Nanofabrication of Diffractive X-ray Optics for Synchrotrons and XFELs

Program Description

We present recent developments in nanolithography to produce diffractive x-ray optics. For the use at synchrotrons we have developed a new generation of Fresnel zone plates produced by a line doubling approach. These lenses can resolve features down to 9 nm in the soft x-ray range and down to 15 nm in the multi keV range.

For use at x-ray free-electron laser (XFEL) sources, diffractive optics must be capable of withstanding extreme radiation loads. We show how diffractive optics made of diamond can be used for various applications including nanofocusing, beam-splitting, spectral monitoring, and ultrafast time resolved studies.